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Multilayer Polarimeter

Features | Specification | Photos | Multilayer Fabrication | Accuracy

Multilayer Fabrication and Characteristics


Multilayer fabrication

Step by step fabrication process
for multilayers

Multilayer photo

Photograph of Mo/Si reflection and
transmission multilayers

Characteristics of multilayers

Materialsd (nm)NΓρ (nm)
Mo/Si9.401000.33< 0.4
Cr/C3.132800.33< 0.4
Cr/Sc2.574000.5< 0.4
W/B4C1.733500.24< 0.4

d: period length

N: the number of layer pairs

Γ: the ratio of layer thickness of the 1st element to d

ρ: Roughness of the interfaces and surfaces

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